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JF-MF-AC Series Chemical Filter
JF-MF-AC series three-component chemical filter is specially designed to remove fluoride, acid-base gas pollutants. The purification efficiency can reach ≥99%, which can stably control harmful gases at ppb level and effectively capture various corrosive and harmful gas pollutants, ensuring a safe clean environment.
Description
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Product overview
JF-MF-AC series three-component chemical filter is specially designed to remove fluoride, acid-base gas pollutants. The purification efficiency can reach ≥99%, which can stably control harmful gases at ppb level and effectively capture various corrosive and harmful gas pollutants, ensuring a safe clean environment. The filter material is treated with curing technology, which eliminates the risk of particle precipitation, as well as the release of ions and volatile organic compounds, preventing secondary contamination. The filter has the advantages of low aerodynamic resistance and high dust holding capacity, low energy consumption and long service life. The product strictly complies with the ISO 14644 cleanliness standard and SEMI standards for AMC inspection in the semiconductor industry.
Applications
Suitable for use in scenarios with stringent gaseous pollutant control requirements, such as the semiconductor industry and precision electronic components manufacturing.
Technical parameters / Recommendations for selection
| Dimensions | standard / customized, adaptable to FFU, MAU, AHU and other systems |
| Fluoride removal efficiency | One-time purification efficiency against HF, fluoride aerosols and fluorinated organic gases: ≥ 99.0% Cleaning efficiency from acid/alkaline gases (SO₂, NH₃, etc.): ≥ 95% |
| Initial and final resistance | ≤ 105 Pa at a speed of 0.3–0.6 m/s; Recommended final resistance: ≤ 350–450 Pa |
| Adsorption medium | special modified fluoride removal medium |
| Construction | drum type / dense-corrugated panel / highly efficient corrugated |
| Frame material | standard - ABS plastic case; optional - galvanized steel or stainless steel |
| Sealing compound | PU polyurethane adhesive |
| Installation method | snap-type seal (standard - EVA) |
| Temperature and humidity | 10–50 °C; Humidity: 40-70% RH (typical clean room conditions) |
Selection table for standard sizes
| Number
| Width (W) × Height (H) × Depth (D) | Nominal capacity (m³/h)
| Areas of application
| |
| inch
| mm
| |||
| 1 | 22×22×4 | 570×570×96 | 500 | Compatible with FFU modules |
| 2 | 46×22×4 | 1170×570×96 | 1000 | Compatible with FFU modules |
| 3 | 46×46×4 | 1170×1170×96 | 2000 | Compatible with FFU modules |
| 4 | 24×24×12 | 610×610×295 | 2800 | Adaptation to air conditioners and non-standard air ducts |
Note: Custom sizes are available upon request to fit FFU, MAU, AHU and process vents.
Thickness selection: For standard cleaning systems, a thickness of 69–90 mm is recommended; for exhaust gases with a high concentration of fluorine or with increased requirements for purity, a thicker version with a thickness of 292 mm is recommended.
Initial resistance fluctuation range: ±10% (at an air flow speed of 0.3–0.6 m/s).
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